Speakers and Presentation Topics

Consumer MEMS outlook strong thanks to new usage
Jérémie Bouchaud
Director and Senior Principal Analyst MEMS & Sensors
IHS iSuppli

MEMS devices for consumer electronics continue to be the true success story for MEMS. The market was up 15.4% in revenue again in 2012 despite a very slow global economy. The market will almost double from 2012 to 2016 to top $5.6 billion up from $2.9 billion in 2012, an enviable 17.7 % CAGR over this time period.

The main reason for this impressive expansion is the booming market for smartphones and tablets. These products accounted for 70% of the value of the consumer market in 2012 and will represent 71% of the MEMS consumption in 2016. These products are a hotbed for all kinds of MEMS, from accelerometers to compasses and gyroscopes, BAW filters, and microphones; not forgetting emerging categories such as pressure sensors for indoor navigation, MEMS actuators for optics autofocus, pico-projectors, thermopiles, etc.

Logically, the top OEMs for smartphones and tablets are ruling the purchase of MEMS. Apple purchased $728 million MEMS products last year, followed by Samsung with an estimated $556 million. These two companies are rapidly expanding their weight and influence on the MEMS industry, and they accounted for 44% of the MEMS buying in the consumer and mobile space in 2016—up from only 16% in 2008. New in 2012 was the fast rise of Chinese OEMs in the purchasing of MEMS. Chinese OEMs accounted for 18% of the world consumption of these MEMS devices in handsets up from 11% in 2011.

Looking beyond 2015, MEMS must look for their next “El Dorado” though as the smartphone and tablet markets will show the first signs of erosion. Laptops, for example, offer renewed opportunity in the form of ultra-books, inspired by tablets, and copying their sensor content. Headsets are a promising market for MEMS microphones and is relatively untapped outside of Apple. Smart TVs call for innovative interfaces and MEMS motion sensors are beginning to be used in remote controls. Finally, the iPhone and the Wii did not only trigger the imagination of an army of developers regarding the use of motion sensors, they also made accelerometers and gyroscopes affordable for completely new applications (sports, fitness, and all sorts of toys and gadgets). IHS will present also new types of sensors beyond the strict definition of MEMS which are increasingly populating our consumer devices e.g. humidity sensors, UV sensors, gas sensors and light sensors.

Biography: Mr. Bouchaud is head of market research for Sensors and is responsible for over 100 sensor-related consulting and market research studies. His breadth of knowledge in sensor applications and individual markets—such as in sensors for the automotive and consumer markets—is unique to the industry.

Jérémie is a graduate of the Munich University of Applied Sciences in Germany and of the École Supérieure de Commerce of Grenoble, France. He was in charge of technology transfer for sensors and MEMS at the German office of CEA-LETI (a leading French R&D center in semiconductor and MEMS) between 1998 and 2000 when he joined WTC as co-founder. Jérémie speaks French, English and German.

An overview of MEMS and non-MEMS high performance gyros
Ariel Cao
Director of Business Development
Tronics Microsystems

MEMS gyroscopes were first demonstrated on quartz in the early 1980s, and the first working MEMS gyro on silicon was built in 1987. It was seven years later that performance suitable for automotive application was achieved, and it is only in 1998 that Robert Bosch GmbH (Germany) introduced the first silicon MEMS gyro for Electronic Stability Program (ESP) systems, a major milestone enabling the widespread use of gyros for automotive and then for consumer applications in the 2000s.

As MEMS gyros are leveraging batch technologies initially developed for microelectronics, it is not surprising that they offer the most advantageous unit price among all gyro technologies. Apart from cost reduction, MEMS technology offers additional benefits such as size reduction, power reduction and ruggedness. For high performance, the RLG and FOG gyro technologies have been dominant in the last two decades. Could the next decade be the one of the high performance MEMS gyro?

Biography: During his career, Ariel Cao has accumulated over +25 years of industry experience covering marketing, management, semiconductor and MEMS technologies, EDA software and telecommunications IC design as well as a strong understanding of business and industry issues. He has published numerous articles in technology publications. In 1983 after completing his first Master of Sciences from ESIEE (Paris), he extended his academic credentials in 1986 with a Masters of Science and Electrical Engineering from SCU.

He has worked as an IC designer, Software developer and engineering manager with several IC design groups at EXAR, Silicon Compilers, Sun Microsystems (UltraSparc I) and Mentor Graphics (A/M-S and RF). During this period with Mentor Graphics, he established significant agreements with strategic customers including Rockwell, Level One Communications, Matsushita, Motorola, LSI Logic, ST Microelectronics and Lucent.

In 2000, he joined MEMSCAP as Executive Vice President of Marketing and GM of US operations. In 2001, the company completed successfully an IPO of $100M at the Euronext (Paris) to finance its manufacturing operations of optical components. Continuing his entrepreneurship focus on developing US subsidiaries for French companies, Ariel created and managed the US subsidiary of PHS MEMS until 2004 as General Manager and Director of Business Development.

Now with Tronics Microsystems as Director of Business Development for North America, he focused on developing strategic partnerships along the technology platforms (e.g. accelerometer, gyroscope and pressure sensor) for custom component in application domains such inertial, biomedical systems and smart systems.

High performance: the future of MEMS inertial sensors
Brad Chisum
Lumedyne Technologies

The Inertial sensor market has undergone significant transformation over the past decade with the wide scale adoption of MEMS based sensors. In the past, non-MEMS sensors were the choice for performance applications where MEMS inertial sensors were only applicable to extremely low performance applications such as in airbags. As MEMS technology improved, so did the application base. Currently, MEMS inertial sensors are used for a number of applications such as tilt sensing, gesture recognition, and image stabilization. Though MEMS technologies have improved over the past decade, the industry is starting to reach the performance limitations of capacitive technologies and the focus is largely on reducing the size, cost, and power requirements of these devices while increasing functionality through sensor fusion. Today, multiple sensors are available in a single package with 3, 6, 9, and even 10 ‘axis’ devices available. But, in order to keep up with industry demands, next generation inertial sensors will need to continue to improve on functionality and power consumption while simultaneously making dramatic improvements in sensor performance. To do this, new technology is required. And there are new technologies in development today that promise to deliver this performance while simultaneously continuing the downward push on power and cost. The arrival of these technologies promises to usher in a new era of inertial sensing that will revolutionize both the MEMS and non-MEMS inertial sensor world.

Biography: Brad Chisum has over fifteen years of experience in MEMS and Semiconductors. At STMicroelectronics, he successfully led teams to improve inventory management and production efficiency and was recognized as the site’s most effective team leader. In 2002, Mr. Chisum joined SPAWAR, a U.S. Navy research laboratory, where he headed up their Advanced Photolithography Research Program where he helped improve the facilities to world-class standards. Mr. Chisum left the Navy to found Lumedyne Technologies. Since then, Mr. Chisum has been recognized by the Federal Laboratory Consortium for Technology Transfer for "Outstanding Commercialization Success" of government licensed technology and has been named a 2010 regional Finalist for Ernst & Young's Entrepreneur of the Year Award. He has authored three patents (pending) and his educational background includes three degrees: an MBA from San Diego State University, a B.S. in Electrical Engineering, and a B.S. in Mathematics from Southern Methodist University.

Revolutionizing Timing with Silicon MEMS
Paul M. Hagelin, Ph.D.
Director, MEMS Engineering
SiTime Corporation

For the past several decades, quartz crystal-based oscillators, clock generators and resonators were the primary reference timing components in electronics. As there were no alternatives, OEMs and ODMs accepted the limitations of quartz timing devices in many areas including performance, ruggedness, reliability, size, manufacturing lead time, and pricing. Now, robust MEMS resonators and high performance analog circuits have come together to create innovative products that are revolutionizing the timing industry. With 80% MEMS timing market share and over 150 million devices shipped, SiTime is leading the electronics industry's transition to silicon-based timing.

Biography: Paul has 15 years of entrepreneurial experience in Silicon Valley startups. In 1998, he co-founded C Speed Corporation, a company that developed and delivered MEMS-based optical switches to major telecommunications providers. Next, he co-founded PowerFlare Corporation, a developer of military-grade safety lighting, used by customers worldwide. In 2005, Paul joined SiTime to direct their MEMS design and fabrication efforts. His team continues to drive new MEMS technologies from concept into volume production. Paul holds a Ph.D. in Microelectromechanical Systems from the University of California, Davis.

MEMS foundry services in the age of mass customization: an evolving model to support the flood of sensors
Peter Himes
Vice President of Marketing and Strategic Alliances
Silex Microsystems

MEMS is still by and large characterized by full custom developments where process and design are optimized for specific needs. Innovation still drives advances in materials, processing capabilities, and integrated features, and will continue to be vital for the growth and development of MEMS technologies in the future. However, the Sensory Revolution in electronics and the emerging Internet of Things demand a different model: one where MEMS is more accessible to a wider range of designers. Much like analog linear needed to evolve from 'black art' to specialty discipline, the MEMS industry is poised to make the same crucial transition. This talk will look at the forces driving the MEMS foundry model and discuss changes that are already taking place to democratize this important service.

Biography: Mr. Peter Himes received his BSEE cum laude in Solid State Electronics from the University of Connecticut in 1981, and his MBA from Santa Clara University in 1988. Based in Silicon Valley, Mr. Himes started his career in engineering for National Semiconductor Corporation before moving to marketing and strategic development for Fortune 500 companies and startups alike. Mr. Himes served as Vice President of Sales for SiTime, a MEMS oscillator company, before taking a position as President of Quicksil, a custom foundry in Silicon Valley offering foundry services in MEMS and IC technologies. Since 2011 he has served as Vice President of Marketing and Strategic Alliances at Silex Microsystems, the world's largest pure-play MEMS foundry.

Paradigm shift: sensor fusion and how 2+2=7
Philippe Kahn
Fullpower Technologies

The MEMS sensor marketplace for mobile and wearable devices is changing in three game-changing ways: First, more sensing capabilities are being packed into each sensor. Second, sensors are shrinking in size. Finally, sensor fusion is being used to make sense of all the data flowing through and among the sensors. Collectively, these trends will have a significant impact on the quality and quantity of data generated by mobile and wearable devices.

Take the Jawbone UP wristband that is being used to optimize health and fitness, for example. Using small distributed arrays of sensors and sensor fusion, the wristband would be able to collect and monitor more types of data than it does today. Similarly, although today’s camera-phones incorporate more sensors than they once did, additional sensors would provide users with greater control over their images. In the beginning, camera phones were designed for point-shoot-share simplicity. Today camera phones include very basic controls. With additional sensors, users could have greater freedom in the ways they capture, manipulate and share images. Bottom line, greater sensing capabilities will enable more intelligent devices that deliver better user experiences.

But the future is even more exciting than what I just described. For example, if my phone senses that I'm in my car, the user experience improves significantly because my phone understands the context in which it is operating. With that level of intelligence, the phone could automatically surface those functions that are most relevant to the situation. Then, when the situation changes (let’s say I get out of my car and go jogging) it would automatically adjust the options. And, I could customize all that.

The same thing is true for sleep, work, exercise and pretty much everything we do. In other words, the pervasiveness of small, intelligent sensor webs is transforming mobile and wearable devices from simple utilitarian novelties into powerful optimization tools that improve lifestyles and user experiences.

Wearable medical devices are a great example of that. They represent the next mega-opportunity because they are non-invasive and have long battery lives. Notably, the devices provide a unique opportunity to tie into a new generation therapies including much more efficient personalized prescription dosage and delivery.

With the new generation medical devices, big data tools will take on a new meaning because the massive streams of data must yield useful information. Already, big data and associated crowd-sourcing are changing everything as evidenced by businesses in all industries that are combining their traditional corporate data with data from third parties and social media. When mobile and wearable devices packed with more sensors are added to the growing universe of big data, the result is higher levels of intelligence available on your wrist and in your pocket. It’s a fundamental paradigm shift.

We have the opportunity of revolutionizing Mr. and Ms. Everyone’s health with our IP and technology. It’s an incredible business opportunity, but more importantly, we are improving everyone's health with the new generation of MEMS solutions. That's something to be proud of.

Biography: Philippe is CEO of Fullpower Technologies, Inc. which he co-founded with Sonia Lee in 2003. Industry leaders and countless publications have lauded Philippe for his visionary strategy, technology innovation and his ability to drive an entrepreneurial culture. Philippe is considered one of the most innovative and dynamic leaders in the tech industry. Philippe studied at the ETH in Zurich Switzerland and Sofia-Antipolis. Philippe received his Masters Degree in Mathematics. Philippe graduated in classical flute, with simultaneous minors in composition and chamber music from the Zurich Music Conservatory. Philippe is fluent in 4 languages: English, French, Spanish, and German. Besides working passionately with the teams at Fullpower, Philippe spends his time with his wife, Sonia, and his four children, with whom he enjoys sharing his passion for playing classical music and improvisational jazz, as well as sailing, surfing, backcountry skiing and Crossfit. Philippe is also a trustee of the Lee-Kahn Foundation (www.lee-kahn.org).

In September 2003, Philippe was honored by the Computer History Museum for his continuous innovation and contributions to technology. In February 2002, the International Imaging Industry Association (www.I3A.org) selected Philippe Kahn for its prestigious Leadership of the Year Award. Kahn has received numerous honors and awards including his induction into the industry hall of fame, recognition by BYTE Magazine as one of the Top 20 Most Important People in the history of the computer industry, as well as being the recipient of numerous awards for innovation and technical excellence. Philippe is a technologist, an innovator and an inventor holding several dozen patents.

MEMS trends and developments in 2013
Mike Pinelis, Ph.D.
President and CEO
MEMS Journal, Inc.

The MEMS industry grew by 11-12 percent in 2012, and is expected to continue with double digit growth into the foreseeable future. At the same time, the overall semiconductor industry was essentially flat in 2012 with only a 0.4% growth according to the World Semiconductor Trade Statistics. Increasingly, MEMS and microsystem technologies are becoming of vital strategic importance to Fortune 500 and other major global companies. Already, companies such as Apple, Samsung, GE, Google, Texas Instruments, Cisco, Amazon, IBM and Qualcomm have MEMS R&D “stealth” projects which are expected to drive growth and new product development and differentiation in the next 5-7 years.

The MEMS market continues to be very dynamic with many new technologies and applications continually entering academic and commercial R&D and, eventually, volume production. This talk will provide a brief overview of the emerging trends and developments in the main MEMS application markets such as consumer, mobile, automotive, industrial, biomedical, energy, aerospace and defense. We will also share some “big picture” observations about the overall economic drivers that are shaping the marketplace for MEMS technologies and applications.

Biography: Dr. Mikhail ("Mike") Pinelis is the CEO of MEMS Journal, Inc., an independent publication based in Southfield, Michigan that he founded in 2003 and grew to the current 28,700+ subscribers worldwide. MEMS Journal’s services include marketing and advertising, executive and engineering recruiting, intellectual property brokerage, MEMS and semiconductor equipment brokerage, as well as market research and intelligence.

Prior to MEMS Journal, Dr. Pinelis served as Director of Business Development for ISD Technology Group in Mansfield, Massachusetts. Prior to that, Dr. Pinelis founded and was the CEO of MindCruiser, Inc., a company specializing in developing online intellectual property marketplaces that was sold to Akiva Corporation. Dr. Pinelis is an active participant in the MEMS and semiconductor market sectors and currently serves on advisory boards of leading industry associations such as the Micro Electronics Packaging and Test Engineering Council (MEPTEC) and Micro and Nanotechnology Commercialization Education Foundation (MANCEF).

Dr. Pinelis earned a Bachelor’s degree in Engineering from Harvey Mudd College in Claremont, California and Master’s and Ph.D. degrees in Electrical Engineering with a focus in MEMS and microfluidics at the University of Michigan in Ann Arbor.

Sensor based context awareness
Kevin A. Shaw, Ph.D.
Sensor Platforms, Inc.

Virtually all Smart Phones have MEMS sensors in them now, yet how are they used? The games are fun and screen orientation is helpful, but we can’t say that MEMS sensors have been fully utilized. Can’t we use these sensors to improve how we interact with our phones. Using the existing sensors, my phone can know when I sit in my car, ready to drive home; it can then calculate my arrival time, turn off notifications, and remind me of groceries to pick up. Context Awareness is a way for mobile devices to better understand the situation of a user, and with it mobile devices will seem to be more in touch with and seem to anticipate what users need. We will talk about various forms of context awareness resulting from location services, from soft sensors and from MEMS sensors. Context Awareness has the potential to radically change the way we see our mobile devices!

Biography: Kevin has been pushing the limits of sensor technology for over 20 years. First, he worked to develop low-cost fabrication technologies for MEMS, with over 24 patents to his name. He was a member of the formative engineering team at Kionix, a leader in motion sensors and accelerometers, and was integral in establishing its MEMS process and sensor design. Next, at Calient Optical Components, Kevin was critical in the development of its MEMS optical switch, and in defining new markets for its switching business. He also co-founded and sold Ironwood Technologies, a innovative company in the transportation services sector. He next joined Sensor Platforms, where he lead the transition from a mixed-signal ASIC company to a sensor algorithms software company, where sensor driven software is the gateway to a whole new field of advanced interaction with mobile devices. Now, with MEMS Sensors in virtually every smart phone, he wants those phones to understand the contextual environment that users live and work in. Kevin holds a Doctorate from Cornell University in MEMS and a Masters from Stanford University’s Graduate School of Business, where he is a Stanford Sloan Fellow.

Advancing mobile imaging with MEMS
Eric Sigler
Vice President of Product Marketing
DigitalOptics Corp.

Traditional autofocus camera modules employ voice coil motors to move the lens module along the optical axis of the camera. This technology has reached a point of diminishing returns where further reduction in size or cost yields unacceptable performance compromises. Mechanical actuators based on silicon MEMS have fundamentally different mechanical, electrical and economic characteristics. This makes them highly suitable for next-generation miniature autofocus cameras, providing frame rate autofocus speeds, dramatically reduced power consumption, reduced size, and improved precision at affordable cost.

Biography: Eric Sigler is VP, Product Marketing for DigitalOptics Corporation. He previously served as VP, Business Development for DigitalOptics and VP of Corporate Development for Tessera Technologies, Inc. Prior to Tessera, Eric was a partner at Scale Venture Partners, a Silicon Valley venture capital fund. During his seven years at Scale (and its predecessor BA Venture Partners), he managed investments in a variety of technology start-ups (typically serving as a director or board observer), including in Cygnal Integrated Products (acquired by Silicon Labs), Monolithic Power Systems, Enpirion (power management ICs), IMT (MEMS foundry), Ageia (acquired by NVIDIA), Discera (MEMS timing devices), and Siimpel (acquired by Tessera).

Prior to joining Scale in 2000, Eric was a strategy consultant at Mercer Management Consulting (now Oliver Wyman) and an Economic Analyst with Eastern Research Group. He holds a Bachelor of Arts in Business from the University of Massachusetts, Amherst and a Master of Business Administration from the University of California, Berkeley.

MEMS for the oil and gas upstream industry
Olivier Vancauwenberghe
MEMS Project Manager
Schlumberger MEMS-TC

The Oil & Gas Upstream industry uses an large variety of sensors covering a wide range of applications in the Exploration & Production (E&P) operations. Not surprisingly, at the heart of the arguments to use MEMS technology in the E&P business is their size. But MEMS offer much more, from overall cost reduction to exciting new possibilities in measurements and/or deployments. Given the constraints of operating in harsh environments and exhibiting extremely high performances, their development is far from being straightforward.

In this talk, we will review the various oilfield applications, from seismic exploration, formation evaluation, drilling & measurements, intelligent completions to reservoir monitoring, where MEMS and microsystems can be used, including MEMS pressure gauges, inertial MEMS, fluid property sensors, microfluidic system and wireless deployments.

A perspective will be given on the motivation and the difficulties to develop MEMS for such applications, along with examples of successful development and/or commercial MEMS sensors.

Biography: Olivier Vancauwenberghe is currently MEMS Projects Manager at Schlumberger MEMS Technical Center. He’s managing a small dedicated and highly specialized team for the development of high performance MEMS devices and sensors for new products and applications in the Oil & Gas Exploration industry. He is presently working mostly on MEMS pressure gauges, MEMS inertial sensors and wireless systems. His expertise in MEMS development covers all aspects from concept to product, including design, modeling, micro-fabrication, characterization, qualification and industrialization.

He holds an Engineering/M.S. degree in Materials Science and Microelectronics (1987, UCL, Belgium) and a Ph.D. in Electronic Materials (1991, MIT, USA). After a Post-doctoral position at AT&T Bell Laboratories (USA), he became a faculty Professor at ESIEE (France) in Physics, Microelectronics and Microsystems. His research there focused on the physics and technology of new silicon-based sensors and MEMS, mostly under industrial contracts.

In 2001, he joined Schlumberger first as a Senior Research Scientist at Schlumberger-Doll Research (USA) and, since July 2004, at MEMS-TC (France).

Many thanks to our MEMS Business Forum 2012 speakers (listed below).

Emerging applications for sensors in 2016+
Sandhiprakash (Sandhi) Bhide
Senior Strategist and Futurist

For last 50+ years of computing, humans have molded themselves around computers but not the other way around. Going forward, we want computers and devices to understand you/me/us: who I am, what I want and when, where I am, how I like to do things, and so on. In short, we want devices to mold around us, we want them to be contextually-aware. To achieve this feat, devices would need many sensors similar to humans. The number and type of sensors and sensor-based applications in today’s devices are growing rapidly. But do these sensors help devices to understand you/me/us? Sandhi will explore and paint a vision of the future sensors and emerging applications that devices must have to achieve this dream.

MEMS alternatives to quartz oscillators: why do people want to buy them?
Harmeet Bhugra
Managing Director, MEMS Division
IDT Inc.

Over the past few decades, quartz crystal oscillators (XOs) have been used for frequency reference applications in almost all electronic systems. The current market for timing systems and oscillators is approximately $4 billion, with the vast majority of this market still dominated by quartz-based components. However, non-quartz oscillators are gradually penetrating the marketplace and are increasingly being favored by system designers. We will provide an overview of the timing market and discuss major application trends driving frequency control products. We will discuss non-quartz approaches being taken by various companies and address why alternative solutions to quartz are gaining traction. In particular, we will discuss various MEMS and IC oscillator implementations and how they compare to each other, including the pros and cons of each approach.

MEMS in consumer electronics: will it keep growing forever?
Jeremie Bouchaud, Ph.D.
Director and Principal MEMS Analyst
IHS iSuppli

MEMS devices for consumer electronics broke a new record in 2011 with 31% revenue growth following a 26% increase in 2010. Overall, the four-year market prospects will see the market double from $2.16 billion in 2011, to $4.25 billion in 2015—an enviable 18.5 % CAGR over this time period.

The first reason for this impressive expansion is the booming market for smartphones and tablets. These products are a hotbed for all kinds of MEMS, from accelerometers to gyroscopes, BAW filters, and microphones; not forgetting emerging categories such as pressure sensors for indoor navigation, MEMS actuators for optics autofocus, pico-projectors, thermopiles, etc.

The second reason is the fact that a series of new MEMS devices that came to fruition in 2010 and 2011, and especially 3-axis gyroscopes, started selling in 2010 and will exceed $900 million in 2015. Two other new types of MEMS devices were introduced early in 2011: MEMS joysticks for gaming, handsets and tablets, and a new format of thermopile that measures the temperature of the case in handsets and tablets next to the processor. The teardown team at IHS iSuppli also started to find RF MEMS based antenna tuners in smartphones at the end of 2011. Also, MEMS timing is no longer the playground for start-ups as major players recently stepped into this market—namely IDT and NXP. There are, in total, 10 types of MEMS devices including gas sensors and actuators for autofocus in camera phones which did not exist five years ago, and that will (themselves) generate close to $2 billion in 2015.

Some areas however, are less rosy. The “casual” gaming market (i.e., the users of mass appeal Nintendo Wii type products) is saturating, and as a result MEMS sensor sales into this segment fell 21% in 2011. New-generation platforms will generate revenue again in 2013 through 2015.

Also the golden years are behind for accelerometers in the consumer space, 2011 was the last year with a double digit revenue growth and IHS iSuppli anticipates only a 6% CAGR from 2011 2015.

IHS iSuppli will give its take on the so called next “killer apps” .The presentation will also highlight in which segments newcomers may still have a chance to grab a share of the pie, and where it is too late.

Finally, IHS iSuppli will address the adjacent opportunities created by the proliferation of MEMS in consumer devices, e.g. for software suppliers or for new generations of processors supporting context awareness.

MEMS: enabling distributed healthcare
Shahin Farshchi, Ph.D.
Lux Capital Management

Over the past 15 years, we witnessed MEMS technology revolutionize DNA analysis, lab automation, and devices used in surgery & clinical diagnostics. As our society becomes more connected, it is not just the microfluidic capabilities that MEMS brings to bear that is transformational, but also the various sensing, communications, energy harvesting, and computational capabilities that can revolutionize healthcare. In this talk, we will consider an environment where a cloud-connected, constantly-data-generating society can receive treatment from healthcare providers anywhere at any time, and role MEMS can play in facilitating wellness, as well as the required interfaces between patients, providers, and treatment.

Emerging opportunities for RF-MEMS in mobile applications
Jeffrey Hilbert
President and Founder
WiSpry, Inc.

3G and rapidly growing 4G mobile applications have intensified the requirements for a new, disruptive technology to implement next generation radio hardware particularly in the RF front-end of these devices. RF micro-electro-mechanical systems (RF-MEMS) is one such technology. Recent progress in RF-MEMS has provided growing access to the numerous benefits enabled by micro-mechanical solutions while achieving the cost points and scalability required for success in the mobile applications market.

This talk will review the current status of RF-MEMS in mobile applications as well as look at future product applications and integration opportunities. By way of an example, state-of-the-art results from the implementation of software tunable, digital, RF-CMOS MEMS circuits will be discussed.

Nano and micro patterning of carbon, and where BioMEMS is going
Marc Madou, Ph.D.
University of California, Irvine

The carbon MEMS (C-MEMS) microfabrication technique is based on the pyrolysis of shaped/patterned polymers (e.g., resists patterned with photolithography) at different temperatures and different ambient atmospheres. Carbon, because it is brittle and hard, is a difficult material to machine. Polymers on the other hand, can be machined easily in a wide variety of machine tools. In the embodiment of the C-MEMS
process that allows us to make the very smallest carbon features, a photoresist is patterned by lithography and is subsequently pyrolyzed at high-temperature in an oxygen-free environment. The resulting carbon material was found to be amorphous and glassy carbon-like in electrochemical behavior. Using a combination of photolithography, near field and far-field electro spinning for patterning polymer precursors and carbonization of the thus patterned precursors, a wide variety of new carbon based devices are enabled.

MEMS sensor performance: An interplay between technologies, software and sensor fusion
Frank Melzer, Ph.D.
Bosch Sensortec GmbH

A big enabler of new applications in today’s handheld devices are MEMS sensors. In the past few years the integration of different sensors with different technologies increased steadily. This evolution does not only challenge the development of single components as such, but also requires new approaches towards integration and sensor signal processing. As a result, sensor fusion does not only mean the integration of the MEMS devices into one package, but also the process of handling multiple sensors’ raw data in such a manner that the resulting data is an enhanced subset of initial raw sensor data to achieve a superior performance. This presentation provides an insight into the different sensor fusion possibilities and requirements of IMUs and 6-/9- and 10- degrees of freedom sensor solutions.

MEMS: how did we get here?
Kurt Petersen, Ph.D.

During the past 30 years, MEMS has grown from a cottage industry to a multi-billion dollar market. Today, people are actually seriously talking about a one trillion part MEMS market. When I began building MEMS devices, I had to build my own equipment for double-sided wafer lithography, aligned wafer bonding, and sprayed photo-resist for complex surface topographies. Today, there are many sophisticated pieces of wafer processing equipment commercially available by vendors solely for manufacturing MEMS. For most of the past 30 years, MEMS has been a poor second cousin to the IC industry. Today, the traditional IC industry has whole-heartedly embraced MEMS, and MEMS now appears almost as a “more than Moore” savior of the IC industry. How and why has MEMS achieved this status? I believe the reason is similar to why new start-up companies are successful; the Team, the Market, and the Technology. We will consider this question in more detail during this presentation.

Harsh environment MEMS for energy and power applications
Al Pisano, Ph.D.
University of California, Berkeley

In this presentation, current research and future visions will be presented for extreme harsh environment, MEMS wireless sensors fabricated from silicon carbide and aluminum nitride. These sensors are being integrated with silicon carbide electronics and aluminum nitride energy harvesting devices to build the first instance of a single-chip, self-powered, wireless sensor system. The seminar will begin with a research motivation that examines the actual flows of energy (about 100 exajoules per year) through the United States. This energy flow is approximately 85% derived from the combustion of fossil fuel, and so the seminar proceeds to outline the options for a true high-temperature sensor system (600-1000 C). The seminar then will present a series of visions of sensors that can survive combustion environments, including some prototypes that have survived 600ºC, 64,000 g shocks and a jet of dry steam. A number of thin film materials, suitable for fabrication via MEMS methods will be described as candidates for application to this sensor suite. Then, a number of sensors, both existing and under development, will be presented. Integration into silicon carbide electronics will be addressed, and new research results for the fabrication and testing of silicon carbide electronic devices (both active and passive) will be presented. The use of aluminum nitride as a RF component in harsh environments will be described and new results for temperature-compensated radio filters shown. A future vision of a single-chip, self-powered, wireless sensor systems will be described, and a set of conclusions about the future of the technology will be given.

RF MEMS switches and tuners: commercialization trends and business opportunities
Gabriel Rebeiz, Ph.D.
University of California, San Diego

RF MEMS (radio frequency micro-electro-mechnical-systems) ohmic switches and tunable capacitors are now being used in high speed testers and in tunable antennas for cell phone applications. They offer extremely high performance at DC-6 GHz (very low loss, high linearity, high-Q, high power and voltage handling) and this has lead to a large development effort in a number of start-up companies and research labs. The talk will introduce the technical challenges in building RF MEMS devices for high volume applications, and will summarize the leading companies in this field.